Chaotic Systems and Plasma Physics Laboratory is a research group within the Department of Mechanical Engineering specializing in advanced computational fluid dynamics (CFD), molecular dynamics (MD), and plasma simulations for semiconductor and display processing equipment. Our lab employs a wide range of state-of-the-art modeling techniques—including 2D/3D numerical simulations, Particle-in-Cell/Monte Carlo Collision (PIC-MCC) methods, Molecular Dynamics (classical MD and Reactive MD), and Density Functional Theory (DFT)—to precisely analyze the complex fluid dynamics and chemical reactions occurring in plasma processing environments. Through these approaches, we systematically investigate microscale phenomena such as plasma distribution, transport of reactive species, thin-film deposition mechanisms, surface reactions, and etching behavior inside plasma reactors.